Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
- Author(s):
Ding, G. ( Shanghai Jiaotong Univ. (China) ) Zhang, Y. Yang, C. Zhao, X. Yu, A. Shen, T. - Publication title:
- Micromachining and Microfabrication Process Technology and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4601
- Pub. Year:
- 2001
- Page(from):
- 312
- Page(to):
- 317
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- Language:
- English
- Call no.:
- P63600/4601
- Type:
- Conference Proceedings
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