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High-aspect-ratio PMMA microstructures fabricated by RIE

Author(s):
Yu, A. ( Shanghai Jiaotong Univ. (China) )
Ding, G.
Yang, C.
Li, C.
Mao, H.
Ni, Z.
1 more
Publication title:
Micromachining and Microfabrication Process Technology and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4601
Pub. Year:
2001
Page(from):
278
Page(to):
283
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
Language:
English
Call no.:
P63600/4601
Type:
Conference Proceedings

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