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Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist

Author(s):
Liu, J. ( Shanghai Jiaotong Univ. (China) )
Cai, B.
Zhu, J.
Ding, G.
Zhao, X.
Yang, C.
Chen, D.
2 more
Publication title:
Micromachining and Microfabrication Process Technology and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4601
Pub. Year:
2001
Page(from):
200
Page(to):
204
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
Language:
English
Call no.:
P63600/4601
Type:
Conference Proceedings

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