Structual optimization of NiTi/Si diaphragm used in micropumps
- Author(s):
- Publication title:
- Micromachining and Microfabrication Process Technology and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4601
- Pub. Year:
- 2001
- Page(from):
- 153
- Page(to):
- 160
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- Language:
- English
- Call no.:
- P63600/4601
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Dynamic Characteristic Analysis of the Micropump Considering the Diaphragm Stiffness
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
Elsevier |
5
Conference Proceedings
Theoretical evaluation of electroactive-polymer based on micropump diaphragm for air flow control
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |