Blank Cover Image

Structual optimization of NiTi/Si diaphragm used in micropumps

Author(s):
Publication title:
Micromachining and Microfabrication Process Technology and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4601
Pub. Year:
2001
Page(from):
153
Page(to):
160
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443403 [0819443409]
Language:
English
Call no.:
P63600/4601
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dynamic actuation behavior of NiTi/Si diaphragm micropump

Xu,D., Wang,L., Ding,G., Zhou,Y., Yu,A., Cheng,X., Chen,J., Cai,B.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Application of a plastic diaphragm for a silicon micropump

Kang,I.-B., Son,M.-T., Haskard,M.R., Samaan,N.D., Ju,B.-K.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Numerical analysis of a composite diaphragm microactuator

Chen, J., Cai, B., Wang, L., Xu, D., Cheng, X.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings The phase transformation and mechanical behavior of NiTi thin films

Yuan, Z., Cheng, X., Xu, D., Ye, Z., Zhang, Y., Cai, B.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance

Cheng, X., Xu, D., Chen, J., Cai, B., Ding, G.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Dynamic Characteristic Analysis of the Micropump Considering the Diaphragm Stiffness

D. Jiang, S.J. Li, G. Bao

Trans Tech Publications
4 Conference Proceedings Novel micropump actuated by thin film shape memory alloy

Xu,D., Cai,B., Ding,G., Zhou,Y., Yu,A., Wang,L., Zhao,X.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Light Olefins from Syngas over Modified Fischer Tropsch Catalysts

Xu, L. -Y., Wang, Q. -X., Xu, Y. -D., Huang, J. -S., Cai, G. -Y., Chen, G. -Q.

Elsevier
5 Conference Proceedings Theoretical evaluation of electroactive-polymer based on micropump diaphragm for air flow control

Xu, T.-B., Su, J., Zhang, Q.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings A Micromachined Diaphragm Micropump

Lin, Yu-Cheng, Hesketh, Peter J., Lunte, Susan M., Wilson, George S.

Electrochemical Society
6 Conference Proceedings Surface relief of TiNiCu thin films

Cheng, X., Xu, D., Cai, B., Wang, L., Chen, J., Li, G., Xu, S.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Control of internal stress in SMA/Si bimorph microactuators

Wang,L., Xu,D., Cai,B., Cheng,X.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12