Thin films residual stress measurement by optical profilometry

Author(s):

Costa, M.F.M. ( Univ. do Minho (Portugal) )  

Publication title:

Advanced photonic sensors and applications II : 27-30 November 2001, Singapore

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4596

Pub. Year:

2001

Page(from):

1

Page(to):

8

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443267 [0819443263]

Language:

English

Call no.:

P63600/4596

Type:

Conference Proceedings