Full-field suface measurement technique for optical metrology applications

Full-field suface measurement technique for optical metrology applications

Author(s):

Wee, K.H. ( Nanyang Technological Univ. (Singapore) )
Shum, P.
Chye, T.C.
Jing, L.W.

Publication title:

Photonic systems and applications : 27-30 November 2001, Singapore

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4595

Pub. Year:

2001

Page(from):

237

Page(to):

242

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443250 [0819443255]

Language:

English

Call no.:

P63600/4595

Type:

Conference Proceedings

Details

TDL ID:	ZA00012423
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Photonics and Applications : Photonic systems and applications
Conf. info. (Number):	2001
Conf. info. (Venue):	Singapore
Conf. info. (Date):	2001.11.27-2001.11.30

Similar Items:

1 Conference Proceedings Investigation on rewritable multilevel reflection modulation recording phase-change optical disk Shi,L.P., Chong,T.C., Wee,E.M., Miao,X.S., Tan,P.K., Lim,K.G., Li,J.M., Qiang,W. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Measurement of twist-induced circular birefringence distribution in optical fibers Dong, H., Shum, P., Gong, Y., Wu, C. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Technique for noninvasive monitoring of blood loss via oxygen saturation measurements in the eye Smith,M.H., Denninghoff,K.R., Hillman,L.W., Hughes,C.E., Minninch,T.E., Chipman,R.A. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Distributed measurement of polarization mode dispersion in optical fibers by using P-OTDR Dong, H., Shum, P., Gong, Y., Wu, C. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Applications of optical fiber techniques to optical metrology Bao,N.-K., Jin,G.-C., Chung,P.-S. SPIE-The International Society for Optical Engineering	9 Conference Proceedings The Use of Full-Field Optical Imaging Techniques in the Automotive Industry H.,Buckberry C., P.,Towers D. CNR
4 Conference Proceedings The design of a broadband microstrip patch sensor for high-frequency remote sensing operations Hansen, H.J., Hall, L.T., Shum, T.C., Seow, W.S. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Spatially and spectrally resolved polarization mode dispersion measurement in optical fibers H. Dong, P. Shum Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Metrology of refractive microlens arrays Weible, K. J., Volkel, R., Eisner, M., Hoffmann, S., Scharf, T., Herzig, H. -P. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Benzene hydrogenation over Pt/siliceous zeolites T.C. Tsai, L.W. Wang, C.L. Lu, P.R. Tsai, H.W. Chen, P.H. Liao, S.B. Liu Elsevier
6 Conference Proceedings Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films Edwards, N.V., Vella, J., Xie, Q., Zollner, S., Werho, D., Adhihetty, I., Liu, R., Tiwald, T.E., Russell, C., Vires, J., … Materials Research Society	12 Conference Proceedings Optical Diagnostics for Process Control:Application of a Laser-Based Technique for Real-Time Analysis of Particle Flow from an Oil-Fired Combustor Bonin,M.P., Malcolmson,A.P., Fang,T.C., Muzio,L.J. Air & Waste Management Association

1

2

3

4

5

6

7

8

9

10

11

12