Microstructuring irradiated by 197- and 308-nm excimer lasers
- Author(s):
- Publication title:
- Photonic systems and applications : 27-30 November 2001, Singapore
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4595
- Pub. Year:
- 2001
- Page(from):
- 147
- Page(to):
- 150
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443250 [0819443255]
- Language:
- English
- Call no.:
- P63600/4595
- Type:
- Conference Proceedings
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