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Mobility spectrum techniques for characterizing multilayer semiconductors structures

Author(s):
Musca, C.A. ( Univ. of Western Australia )
Nguyen, T.
Antoszewski, J.
Redfern, D.A.
Dell, J.M.
Faraone, L.
1 more
Publication title:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4593
Pub. Year:
2001
Page(from):
314
Page(to):
321
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443236 [0819443239]
Language:
English
Call no.:
P63600/4593
Type:
Conference Proceedings

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