Damping caused by the gas flow in the holes of perforated structures

Damping caused by the gas flow in the holes of perforated structures

Author(s):

Yang, H. ( Delft Univ. of Technology (Netherlands) )
Bao, M. ( Fudan Univ. (China) )
Pakula, L. ( Delft Univ. of Technology (Netherlands) )
French, P.J.

Publication title:

Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4593

Pub. Year:

2001

Page(from):

307

Page(to):

313

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443236 [0819443239]

Language:

English

Call no.:

P63600/4593

Type:

Conference Proceedings

Details

TDL ID:	ZA00012421
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

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