Blank Cover Image

Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

Author(s):
Publication title:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4593
Pub. Year:
2001
Page(from):
176
Page(to):
185
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443236 [0819443239]
Language:
English
Call no.:
P63600/4593
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Novel silicon fabrication process for high-aspect-ratio micromachined parts

Fleming,J.G., Barron,C.C.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings X-ray micromachining of high-aspect-ratio MEMS using SU8 ultrathick photoresist

Malek,C.G.Khan

SPIE-The International Society for Optical Engineering
2 Conference Proceedings High-aspect-ratio microstructure-covered sheets: fabrication and function

Kelly,K.W., Marques,C., Rogers,J.G., Despa,M.S., Collier,J.R.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings FABRICATION OF HOLLOW HIGH ASPECT RATIO METAL MICROSTRUCTURE ARRAYS

Calvert, J. M., Goerger Jr., J. H., Rebbert, M. L., Airerson, M. A., Park, D., Hickman, J.J., Dulcey, C. S., Peckerar, …

Materials Research Society
3 Conference Proceedings Fabrication of high-aspect-ratio coil for electromagnetic actuators using LIGA process

D. Noda, Y. Matsumoto, S. Yamashita, M. Setomoto, T. Hattori

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Optical characterization of microstructures of high aspect ratio

T. Tamulevicius, S. Tamulevicius, M. Andrulevicius, G. Janusas, V. Ostasevicius, A. Palevicius

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry

Borenstein,J.T., Greiff,P., Sohn,J.B., Weinberg,M.S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures Using a Time-Multiplexed Etch-Passivate Process

Evans, L.J., Beheim, G.M.

Trans Tech Publications
5 Conference Proceedings Dry micromachining of high-aspect-ratio Si for microsensors

Pang,S.W.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings High-Aspect-Ratio Micromachining of Fluoropolymers Using Focused Ion Beam

Yoshinori Matsui, Nozomi Miyoshi, Akihiro Oshima, Shu Seki, Masakazu Washio, Seiichi Tagawa

Materials Research Society
6 Conference Proceedings Injection molding using high-aspect-ratio microstructure mold inserts produced by LIGA technique

Despa,M.S., Kelly,K.W., Collier,J.R.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures

M. Balke, E. Peiner, L. Doering

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12