Novel design and fabrication of Si optical bench

Novel design and fabrication of Si optical bench

Author(s):

Choi, H. ( Samsung Advanced Institute of Technology (Korea) )

Publication title:

Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4593

Pub. Year:

2001

Page(from):

137

Page(to):

144

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443236 [0819443239]

Language:

English

Call no.:

P63600/4593

Type:

Conference Proceedings

Details

TDL ID:	ZA00012421
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

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