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Design considerations of the biaxial frequency-shifted microaccelerometer

Author(s):
  • Hwang, D.-H. ( National Chiao Tung Univ. (Taiwan) )
  • Lo, Y.-C. ( Synchrotron Radiation Research Ctr. (Taiwan) )
  • Chin, K. ( National Chiao Tung Univ. (Taiwan) )
Publication title:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4593
Pub. Year:
2001
Page(from):
62
Page(to):
71
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443236 [0819443239]
Language:
English
Call no.:
P63600/4593
Type:
Conference Proceedings

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