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Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting

Author(s):
Murakoshi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Hanada, K.
Li, Y. ( Tokyo Cathode Lab. Ltd. (Japan) )
Uchino, K. ( Tosei Electro Beam Ltd. (Japan) )
Suzuki, T.
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
1 more
Publication title:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4592
Pub. Year:
2001
Page(from):
473
Page(to):
480
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443229 [0819443220]
Language:
English
Call no.:
P63600/4592
Type:
Conference Proceedings

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