LIGA fabrication of high-aspect-ratio lobster-eye optics
- Author(s):
Peele, A.G. ( Univ. of Melbourne (Australia) ) Irving, T.H.K. Nugent, K.A. Mancini, D.C. ( Argonne National Lab. (USA) ) Moldovan, N.A. Christenson, T.R. ( Sandia National Labs. (USA) ) - Publication title:
- Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4592
- Pub. Year:
- 2001
- Page(from):
- 406
- Page(to):
- 413
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443229 [0819443220]
- Language:
- English
- Call no.:
- P63600/4592
- Type:
- Conference Proceedings
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