Three-terminal test structure to measure stiction force using I-V data

Three-terminal test structure to measure stiction force using I-V data

Author(s):

Bhattacharya, E. ( Indian Institute of Technolody/Madras (India) )
Kuang, J. ( Analog Devices, Inc. (USA) )
Judy, M.
Martin, J.

Publication title:

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4592

Pub. Year:

2001

Page(from):

252

Page(to):

256

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443229 [0819443220]

Language:

English

Call no.:

P63600/4592

Type:

Conference Proceedings

Details

TDL ID:	ZA00012420
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS and Microelectronics
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

Similar Items:

1 Conference Proceedings Stiction in Surface Micromachined Structures Bhattacharya, E., Kuang, J., Judy, M., Martin, J. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Three-terminal laser structures for high-speed modulation using variable carrier heating Tolstikhin,V.I., Willander,M. SPIE-The International Society for Optical Engineering
2 Conference Proceedings (190g) Improved Particle-Particle Contact Detection Using Efficient Data Structures Tathagata Bhattacharya, J. J. McCarthy American Institute of Chemical Engineers	8 Conference Proceedings The BepiColombo Spacecraft: The Mercury Transfer Module Structure Qualification Test Campaign Description M.J. Martín Zurdo ESA Communications, ESTEC
3 Conference Proceedings Stiction force estimation from attachment length and electrostatic measurements on cantilever beams (Invited Paper)[6111-01] Bhattacharya, E., Basu, S., Prabhakar, A. SPIE - The International Society of Optical Engineering	9 Conference Proceedings (36d) A Shear and Sedimentation Test Cell (SSTC) for Measuring the Effect of Mixing On the Performance of Chemical Additives Marcio Bezerra Machado, Sujit Bhattacharya, Ng Samson, Suzanne M. Kresta American Institute of Chemical Engineers
4 Conference Proceedings Three-Terminal Charge-Injection Device Jespers P., Millet M. J. Noordhoff Internation Publishing	10 Conference Proceedings A Conceivable Technique of Measuring Sorption Coefficients in Intact Rock Using an Electrical Potential Gradient as the Driving Force for Migration Lofgren, Martin, Neretnieks, Ivars Materials Research Society
5 Conference Proceedings Three-coordinate measuring system with structured light J. Gerber, P. Kühmstedt, R.M. Kowarschik, G. Notni, W. Schreiber Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Measuring Molecular Adhesion with Force Microscopy Dammer U., Anselmetti D., Hegner M., Dreier M. L., Huber W., Hurst J., Misevic G., Guntherodt -J. H. Kluwer Academic Publishers
6 Conference Proceedings Designing and Building a Force Plate for Measuring Input Forces in Modal Tests,#326 Howard,J.N., Kaiser,M.A., Murray,T.M. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Visualization of Post-Processed Cfd Data in a Virtual Environment Vishant J. Shahnawaz, Judy M. Vance, Sasikumar V. Kutti American Society of Mechanical Engineers

1

2

3

4

5

6

7

8

9

10

11

12