Simple wet etching of GaN

Simple wet etching of GaN

Author(s):

Parish, G. ( Univ. of Western Australia )
Scali, P.A.
Spaargaren, S.M.R.
Nener, B.D.

Publication title:

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4592

Pub. Year:

2001

Page(from):

104

Page(to):

110

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443229 [0819443220]

Language:

English

Call no.:

P63600/4592

Type:

Conference Proceedings

Details

TDL ID:	ZA00012420
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS and Microelectronics
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

Similar Items:

1 Conference Proceedings Investigations of ohmic contacts to reactive ion-etched p-type GaN Parish, G., Watson, L.M., Membreno, G.U., Nener, B.D. SPIE - The International Society of Optical Engineering	7 Conference Proceedings ECR, ICP and RIE plasma etching of GaN Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, … Electrochemical Society
2 Conference Proceedings Magnetoresistance characteristics of gamma-irradiated Al0.35Ga0.65N/GaN HFETs Umana-Membreno, G.A., Dell, J.M., Parish, G., Nener, B.D., Faraone, L., Ventury, R., Mishra, U.K. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Focused Ion Beam Etching of GaN Flierl, C., White, I. H., Kuball, M., Heard, P. J., Allen, G. C., Marinelli, C., Rorison, J. M., Penty, R. V., Chen, Y., … MRS - Materials Research Society
3 Conference Proceedings Relative infrared transmission measurements of EOPACE Nener,B.D. SPIE-The International Society for Optical Engineering	9 Conference Proceedings The Mechanism of Photoenhanced Wet Etching of GaN Bardwell, J.A., Webb, J.B., Tang, H., Fraser, J., Moisa, S. Electrochemical Society
4 Conference Proceedings Pulsed Laser Etching of GaN and AlN Films Chen, H., Vispute, R. D., Talyansky, V., Enck, R., Ogale, S. B., Dahmas, T., Choopun, S., Sharma, R. P., Venkatesan, T., … MRS - Materials Research Society	10 Conference Proceedings Particle trajectories and clearing times after mechanical door openings on the MSX satellite Green,B.D., Galica,G.E., Mulhall,P.A., Dyer,J.S., Uy,O.M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Highly Selective Photoenhanced Wet Etching of GaN for Defect Investigation and Device Fabrication Visconti, P., Reshchikov, M.A., Jones, K.M., Yun, F., Wang, D. F., Cingolani, R., Morkoc, H., Litton, C. W., Molnar, R. … Materials Research Society	11 Conference Proceedings Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN Pearton, S. J., Vartuli, C. B., Lee, J. W., Donovan, S. M., MacKenzie, J. D., Abernathy, C. R., Shul, R. J., McLane, G. … MRS - Materials Research Society
6 Conference Proceedings Performance of MWIR HgCdTe Photovoltaic Detectors Fabricated by Reactive Ion Etching Induced Type Conversion Rais,M.H., Musca,C.A., Dell,J.M., Antoszewski,J., Nener,B.D., Faraone,L. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Plasma Chemistry Dependent ECR Etching of GaN Shul, R. J., Ashby, C. I. H., Rieger, D. J., Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Barnes, P. … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12