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Experimental investigation of sensitivity dependence with respect to waveguide position on a micromachined diaphragm in a silicon-based integrated optic pressure sensor

Author(s):
Publication title:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4591
Pub. Year:
2001
Page(from):
337
Page(to):
344
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443212 [0819443212]
Language:
English
Call no.:
P63600/4591
Type:
Conference Proceedings

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