Blank Cover Image

Design and test of a low-drift low-noise large-range micro-accelerometer

Author(s):
Publication title:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4591
Pub. Year:
2001
Page(from):
281
Page(to):
291
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443212 [0819443212]
Language:
English
Call no.:
P63600/4591
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Accurate surface reconstruction of large 3D objects from range data

Li, X., He, L., Everding, B., Han, C.Y., Wee, W.G.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Design and fabrication of antireflection coatings on InS substrate [6149-07]

Su, X., Sun, W., Wei, Q., Xu, Y., He, J.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings A hybird micro-accelerometer system with CMOS readout circuit and self-test function [6040-04]

Chen W., Chen H., Lui X., Tan X.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings The Oxide Inclusion and Heat-Affected-Zone Toughness of Low Carbon Steels

W. Shu, X.M. Wang, S.R. Li, X.L. He

Trans Tech Publications
3 Conference Proceedings Range sidelobe reduction for the random binary phase codes

Gu,H., Liu,G., Sun,G., Li,X., Su,W.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Research and design of a large-phase-shift fringe-count interferometric fiber optic accelerometer

Cao, J. N., Zhang, Y. B., Wang, W. X., Hai, T.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Vibrational spectrum of PETN investigated in terahertz range

K. Mu, J. He, X. Jiang, W. Li, R. Feng

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Design and analysis of micro-optic-electro-mechanical accelerometer

Nayak, J., Srinivas, T., Selvarajan, A., Sastry, D.V.K., Unnikrishanan, M.P.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Concentric silicon micro-ring resonators with enhanced transmission notch depth

X. Li, Z. Zhang, Q. Li, M. Qiu, Y. Su

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Cross-talk noise in angle multiplexing holographic memories

Li,X., He,Q., Wu,M., Yan,Y., Jin,G.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer

Zou,Q., Lu,D., Li,B., Xiong,X., Xiong,B., Wang,W.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings A novel quasi-digital detection method of micro differential capacitance in micro-accelerometers

X. Song, J. Fang, R. Yi, W. Sheng

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12