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Modeling MEMS manufacturability in virtual prototyping CAD tool

Author(s):
Sitte, R. ( Griffith Univ. (Australia) )  
Publication title:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4591
Pub. date:
2001
Page(from):
125
Page(to):
133
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443212 [0819443212]
Language:
English
Call no.:
P63600/4591
Type:
Conference Proceedings

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