MEMS- and NEMS-based smart devices and systems (Invited Paper)

MEMS- and NEMS-based smart devices and systems (Invited Paper)

Author(s):: Varadan, V.K. ( The Pennsylvania State Univ. (USA) )
Publication title:: Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4591
Pub. Year:: 2001
Page(from):: 28
Page(to):: 38
Pages:: 11
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819443212 [0819443212]
Language:: English
Call no.:: P63600/4591
Type:: Conference Proceedings

Details

TDL ID:	ZA00012419
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Electronics and structures for MEMS
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

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