Cantilever-type PZT microsensor using resonance frequency for bioMEMS application

Cantilever-type PZT microsensor using resonance frequency for bioMEMS application

Author(s):

Hong, K.-I. ( Hanyang Univ. (Korea) )
Kim, S.-B.
Kim. S.-J.
Choi, D.-K.

Publication title:

BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4590

Pub. Year:

2001

Page(from):

337

Page(to):

344

Pages:

8

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443205 [0819443204]

Language:

English

Call no.:

P63600/4590

Type:

Conference Proceedings

Details

TDL ID:	ZA00012418
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : BioMEMS and smart nanostructures
Conf. info. (Number):	2001
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2001.12.17-2001.12.19

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