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Nanofabrication processes for single-ion implantation of sillicon quantum computer devices

Author(s):
McKinnon, P.P. ( Univ. of New South Wales (Australia) )
Stanley, F.E.
Buehler, T.M.
Gauja, E.
Peceros, K.
Macks, L.D.
Mitic, M.
Chan, V.
Dzurak, A.S.
Clark, R.G.
Yang, C.J. ( Univ. of New South Wales (Australia) )
Jamieson, D.N. ( Univ. of Melbourne (Australia) )
Prawer, S.D.
8 more
Publication title:
BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4590
Pub. date:
2001
Page(from):
310
Page(to):
318
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443205 [0819443204]
Language:
English
Call no.:
P63600/4590
Type:
Conference Proceedings

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