Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process
- Author(s):
- Spillman, W.B., Jr. ( Virginia Polytechnic Institute and State Univ. (USA) )
- Zeng, T.
- Claus, R.O.
- Publication title:
- BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4590
- Pub. Year:
- 2001
- Page(from):
- 162
- Page(to):
- 172
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443205 [0819443204]
- Language:
- English
- Call no.:
- P63600/4590
- Type:
- Conference Proceedings
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