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Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process

Author(s):
Publication title:
BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4590
Pub. date:
2001
Page(from):
162
Page(to):
172
Pages:
11
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443205 [0819443204]
Language:
English
Call no.:
P63600/4590
Type:
Conference Proceedings

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