Novel Alignment Technologies for Wafer Level Packaging
- Author(s):
- Brubaker, C. ( EV Group US, Inc. )
- Glinsner, T. ( EV Group )
- Lindner, P.
- Schaefer, C.
- Tischler, M.
- Publication title:
- Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4587
- Pub. Year:
- 2001
- Page(from):
- 594
- Page(to):
- 599
- Pages:
- 6
- Pub. info.:
- Washington, DC: IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815646 [0930815645]
- Language:
- English
- Call no.:
- P63600/4587
- Type:
- Conference Proceedings
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