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High-Density, Low-Loss MOS Capacitors for Integrated RF Decoupling

Author(s):
Roozeboom, F. ( Philips Research )
Elfrink, R.J.G.
Rijks, G.S.M., Th
Verhoeven, J.F.C.M.
Kemmeren, A.
van den Meerakker, J.E.A.M.
1 more
Publication title:
Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4587
Pub. date:
2001
Page(from):
477
Page(to):
483
Pages:
7
Pub. info.:
Washington, DC: IMAPS
ISSN:
0277786X
ISBN:
9780930815646 [0930815645]
Language:
English
Call no.:
P63600/4587
Type:
Conference Proceedings

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