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Microassembly station with controlled environment

Author(s):
Zhou, Q. ( Univ. of Technology(Finland) )
Aurelian, A.
del Corral, C.
Esteban, P.J.
Kallio, P.
Chang, B.
Koivo, H.N. ( Helsinki Univ. of Technology(Finland) )
2 more
Publication title:
Microrobotics and microassembly III : 29-30 October 2001 Newton
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4568
Pub. Year:
2001
Page(from):
252
Page(to):
260
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442963 [0819442968]
Language:
English
Call no.:
P63600/4568
Type:
Conference Proceedings

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