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Characterization of Lattice Defects in Ion-implanted Silicon

Author(s):
Publication title:
X-ray and neutron dynamical diffraction : theory and applications
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
357
Pub. Year:
1996
Page(from):
301
Page(to):
321
Pages:
21
Pub. info.:
New York: Kluwer Academic Publishers
ISBN:
9780306455018 [0306455013]
Language:
English
Call no.:
N11479/357
Type:
Conference Proceedings

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