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Robust and fast OPC approach for metal interconnects of 0.13um logic devices

Author(s):
Park,J.-S. ( Samsung Electronics Co., Ltd. )
Kim,D.-H.
Park,C.-H.
Kim,Y.-H.
Yoo,M.-H.
Kong,J.-T.
Kim,H.-W.
Yoo,S.-I.
3 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
1104
Page(to):
1111
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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