One step forward to maturity of AF (assistant feature)-OPC in 100-nm level DRAM application

One step forward to maturity of AF (assistant feature)-OPC in 100-nm level DRAM application

Author(s):

Kang,H.-J. ( Samsung Electronics Co., Ltd. )

Publication title:

21st Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4562

Pub. date:

2001

Vol.:

4562

Pt.:

Two of Two Parts

Page(from):

1096

Page(to):

1103

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442901 [0819442909]

Language:

English

Call no.:

P63600/4562

Type:

Conference Proceedings

Details

TDL ID:	ZA00012276
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2001 : 21st
Conf. info. (Venue):	Monterey, CA, USA
Conf. info. (Date):	2001.10.03-2001.10.05

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