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One step forward to maturity of AF (assistant feature)-OPC in 100-nm level DRAM application

Author(s):
Kang,H.-J. ( Samsung Electronics Co., Ltd. )
Kim,B.-S.
Park,J.-S.
Kim,I.-S.
Yeo,G.-S.
Lee,J.-H.
Cho,H.-K.
Moon,J.-T.
3 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. date:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
1096
Page(to):
1103
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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