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Imaging quality analysis using direct Monte Carlo simulation and CAR reaction model in mask fabrication

Author(s):
Ohfuji,T. ( Intel KK )
Kuwahara,N.
Kurihara,M.
Kitano,N.
Fujimoto,S.
Hayashi,N.
Hwang,D.H.
2 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
830
Page(to):
839
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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