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Noncontact electrical critical dimensions metrology sensor for chrome photomasks

Author(s):
Guillaume,N. ( The George Washington Univ. )
Lahti,M.
Cresswell,M.W.
Allen,R.A.
Linholm,L.W.
Zaghloul,M.E.
1 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
822
Page(to):
829
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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