Use of KRS-XE positive chemically amplified resist for optical mask manufacturing
- Author(s):
Ashe,B. ( IBM Microelectronics Div. ) Deverich,C. Rabidoux,P.A. Peck,B. Petrillo,K.E. Angelopoulos,M. Huang,W.-S. Moreau,W.M. Medeiros,D.R. - Publication title:
- 21st Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4562
- Pub. Year:
- 2001
- Vol.:
- 4562
- Pt.:
- Two of Two Parts
- Page(from):
- 664
- Page(to):
- 672
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442901 [0819442909]
- Language:
- English
- Call no.:
- P63600/4562
- Type:
- Conference Proceedings
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