Blank Cover Image

Dry etching characteristics of attenuated phase-shifting masks using Cl2/CF4/O2/He plasmas

Author(s):
Choi,S.J. ( PKL )
Cha,H.-S.
Yoon,S.-Y.
Jung,S.-M.
Choi,S.-S.
Jeong,S.-H.
1 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. date:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
561
Page(to):
570
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

Similar Items:

Yoon, S.-Y., Choi, S.-J., Kim, Y.-D., Lee, D.-H., Cha, H.-S., Kim, J.-M., Choi, S.-S., Jeong, S.H.

SPIE-The International Society for Optical Engineering

Liberman, V., Rothschild, M., Spector, S.J., Krohn, K.E., Cann, S.C., Hien, S.

SPIE-The International Society for Optical Engineering

Choi, S.-J., Cha, H.-S., Yoon, S.-Y., Kim, Y.-D., Lee, D.-H., Kim, J.-M., Kim, J.-S., Min, D.-S., Jang, P.-J., Chang, …

SPIE-The International Society for Optical Engineering

Koo,S.-S., Hur,I.-B., Koo,Y.-M., Baik,K.-H., Choi,I.-H., Kim,L.-J., Park,K.-T., Shin,C.

SPIE - The International Society for Optical Engineering

Cha,H.-S., Choi,S.-J., Yoon,S.-Y., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Iso, H., Harashima, N., Isozaki, T., Kanai, S., Sasaki, T.

SPIE - The International Society of Optical Engineering

Yoon,S.-Y., Cha,H.-S., Choi,S.-J., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Kwon,H.-J., Oh,K.-S., Chang,B.-S., Choi,B.-Y., Park,K.-H., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Lee,S.-W., Shin,I.-G., Kim,Y.-H., Choi,S.-W., Han,W.-S., Yoon,H.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

Kim, I.-S., Jung, S.-G., Kim, H.-D., Yeo, G.-S., Shin, I.-K., Lee, J.-H., Cho, H.-K., Moon, J.-T.

SPIE-The International Society for Optical Engineering

Peng,S., Adir,W.J.

SPIE-The International Society for Optical Engineering

Park, C., Cho, J. H., Choi, C. J., Seol, Y. S., Choi, I. H.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12