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High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS

Author(s):
Publication title:
MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4561
Pub. date:
2001
Vol.:
4561
Page(from):
183
Page(to):
188
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442895 [0819442895]
Language:
English
Call no.:
P63600/4561
Type:
Conference Proceedings

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