Improvement on the surface roughness of microlens array in the excimer laser machining process
- Author(s):
- Wang,S.-Y. ( Precision Instrument Development Ctr. )
- Huang,C.-S.
- Chou,H.-Y.
- Lee,T.-Y.
- Chang,R.-S.
- Publication title:
- MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4561
- Pub. Year:
- 2001
- Page(from):
- 131
- Page(to):
- 138
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442895 [0819442895]
- Language:
- English
- Call no.:
- P63600/4561
- Type:
- Conference Proceedings
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