Modeling the electrostatic self-assembly (ESA) fabrication process using cellular automata

Modeling the electrostatic self-assembly (ESA) fabrication process using cellular automata

Author(s):

Spillman Jr.,W.B. ( Virginia Polytechnic Institute and State Univ. )
Zeng,T.
Claus,R.O.

Publication title:

Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4560

Pub. Year:

2001

Page(from):

140

Page(to):

151

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442888 [0819442887]

Language:

English

Call no.:

P63600/4560

Type:

Conference Proceedings

Details

TDL ID:	ZA00012274
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microfluidics and BioMEMS
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.10.22-2001.10.24

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