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Large-displacement microactuators in deep reactive ion-etched single-crystal silicon

Author(s):
Publication title:
MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4559
Pub. Year:
2001
Page(from):
138
Page(to):
147
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442871 [0819442879]
Language:
English
Call no.:
P63600/4559
Type:
Conference Proceedings

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