Micromachined pressure gauge for the vacuum range based on damping of a resonator

Micromachined pressure gauge for the vacuum range based on damping of a resonator

Author(s):

Kurth,S. ( Fraunhofer Institute for Reliability and Micro Integration )

Publication title:

MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4559

Pub. Year:

2001

Page(from):

103

Page(to):

111

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442871 [0819442879]

Language:

English

Call no.:

P63600/4559

Type:

Conference Proceedings

Details

TDL ID:	ZA00012273
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.01.22-2001.01.23

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