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Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Author(s):
Walraven,J.A. ( Sandia National Labs. )
Cole Jr.,E.I.
Sloan,L.R.
Hietala,S.L.
Tigges,C.P.
Dyck,C.W.
1 more
Publication title:
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4558
Pub. date:
2001
Vol.:
4558
Page(from):
254
Page(to):
259
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442864 [0819442860]
Language:
English
Call no.:
P63600/4558
Type:
Conference Proceedings

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