Whole wafer critical point drying of MEMS devices
- Author(s):
- Resnick,P.J. ( Sandia National Labs. )
- Clews,P.J.
- Publication title:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4558
- Pub. Year:
- 2001
- Page(from):
- 189
- Page(to):
- 196
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- Language:
- English
- Call no.:
- P63600/4558
- Type:
- Conference Proceedings
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