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Micromachining of ultrananocrystalline diamond

Author(s):
Moldovan,N.A. ( Argonne National Lab. )
Auciello,O.H.
Sumant,A.V.
Carlisle,J.A.
Divan,R.
Gruen,D.M.
Krauss,A.R.
Mancini,D.C.
Jayatissa,A.
Tucek,J.
5 more
Publication title:
Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4557
Pub. Year:
2001
Page(from):
288
Page(to):
298
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442857 [0819442852]
Language:
English
Call no.:
P63600/4557
Type:
Conference Proceedings

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