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Dry-etching and nanofabrication technology perspective for novel optical devices/components

Author(s):
Publication title:
Active and passive optical components for WDM communication, 21-24 August 2001, Denver, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4532
Pub. Year:
2001
Page(from):
300
Page(to):
313
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442567 [0819442569]
Language:
English
Call no.:
P63600/4532
Type:
Conference Proceedings

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