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Aberration correction for charged particle lithography

Author(s):
Publication title:
Charged particle detection, diagnostics, and imaging : 30 July - 2 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4510
Pub. Year:
2001
Page(from):
218
Page(to):
224
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442246 [0819442240]
Language:
English
Call no.:
P63600/4510
Type:
Conference Proceedings

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