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Improved reflectance and stability of Mo/Si multilayers

Author(s):
Bajt,S. ( Lawrence Livermore National Lab. )
Alameda,J.B.
Barbee Jr.,T.W.
Clift,W.M.
Folta,J.A.
Kaufmann,B.B.
Spiller,E.A.
2 more
Publication title:
Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4506
Pub. Year:
2001
Page(from):
65
Page(to):
75
Pages:
11
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442208 [0819442208]
Language:
English
Call no.:
P63600/4506
Type:
Conference Proceedings

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