Upgrades to the NIST/DARPA EUV reflectometry facility

Upgrades to the NIST/DARPA EUV reflectometry facility

Author(s):

Tarrio,C. ( National Institute of Standards and Technology )

Publication title:

Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4506

Pub. Year:

2001

Page(from):

32

Page(to):

38

Pages:

7

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442208 [0819442208]

Language:

English

Call no.:

P63600/4506

Type:

Conference Proceedings

Details

TDL ID:	ZA00012220
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Soft X-ray and EUV imaging systems
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2001.07.31-2001.08.01

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