Agile micromirrors with three degrees of freedom manufactured with liquid MEMS technology
- Author(s):
Feinerman,A.D. ( Univ. of Illinois/Chicago ) Friedman,G. Kasman,E. Montgomery,J. Patel,P.R. Megaridis,C.M. Howell,E. Collicott,S.H. - Publication title:
- Free-space laser communication and laser imaging : 30-31 July 2001 San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4489
- Pub. Year:
- 2001
- Page(from):
- 166
- Page(to):
- 176
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442031 [0819442038]
- Language:
- English
- Call no.:
- P63600/4489
- Type:
- Conference Proceedings
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