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Grating groove metrology and efficiency predictions from the soft x-ray to the far infrared

Author(s):
Publication title:
Optical spectroscopic techniques, remote sensing, and instrumentation for atmospheric and space research IV : 30 July-2 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4485
Pub. Year:
2001
Page(from):
405
Page(to):
416
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441997 [0819441996]
Language:
English
Call no.:
P63600/4485
Type:
Conference Proceedings

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