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Low-energy ion implantation-induced control of InP-based heterostructure properties

Author(s):
Aimez,V. ( Univ. de Sherbrooke )
Beauvais,J.
Drouin,D.
Beerens,J.
Morris,D.
Jandl,S.
1 more
Publication title:
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4468
Pub. Year:
2001
Page(from):
95
Page(to):
104
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441829 [0819441821]
Language:
English
Call no.:
P63600/4468
Type:
Conference Proceedings

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